Delta Mask uses the Heidelberg DWL 200 Laser Beam Pattern Generator for mask production.
This instrument works on a pixel basis, which makes it possible to produce chrome masks from all kinds of shapes which may occur in a layout.
Specifications:
Smallest linewidth
: 1.5 micron (with 4mm write lens).
Address grid
: 0.2 micron.
Laser
: HeCd laser, wavelength 442 nm.
Environment
: Class 1000 or better, 22 degr. C.